Metal-organic CVD of Y2O3Thin Films using Yttriumtris-amidinates-Reference-Cited by-同舟云学术

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Metal-organic CVD of Y2O3Thin Films using Yttriumtris-amidinates

Published:2015-11-19 Issue:10-11-12 Volume:21 Page:335-342
ISSN:0948-1907
Container-title:Chemical Vapor Deposition
language:en
Short-container-title:Chem. Vap. Deposition

Author:

Karle Sarah¹,Dang Van-Son¹²,Prenzel Marina³,Rogalla Detlef⁴,Becker Hans-Werner⁴,Devi Anjana¹

Affiliation:

1. Inorganic Materials Chemistry; Faculty of Chemistry and Biochemistry; Ruhr-University Bochum; 44801 Bochum Germany

2. Nano and Energy Center; VNU University of Science; 334 Nguyen Trai Thank Xuan Hanoi Vietnam

3. Chair of Experimental Physics II; Ruhr-University Bochum; 44801 Bochum Germany

4. Dynamitron Tandem Laboratory of RUBION; Ruhr-University Bochum; 44801 Bochum Germany

Publisher

Wiley

Subject

Process Chemistry and Technology,Surfaces and Interfaces,General Chemistry

Reference51 articles.

1. Plasticity of monocrystalline yttrium oxide (Y 2O3) at 0.45 Tm

2. Fluage haute temperature du sesquioxyde d'yttrium: Y2O3

3. High-temperature powder x-ray diffraction of yttria to melting point

4. Electrical and structural characteristics of yttrium oxide films deposited by rf-magnetron sputtering on n-Si

5. Optical properties of TiO2, Y2O3 and CeO2 thin films deposited by electron beam evaporation

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1. The role of thickness on the structural and luminescence properties of Y2O3:Ho3+, Yb3+ upconversion films;Scientific Reports;2024-08-01

2. Syntheses of Group 5 Amide Amidinates and Their Reactions with Water: Different Reactivities of Nb(V) and Ta(V) Complexes;Inorganic Chemistry;2022-11-21

3. High-Performance Iridium Thin Films for Water Splitting by CVD Using New Ir(I) Precursors;ACS Applied Materials & Interfaces;2022-11-09

4. The Quality Improvement of Yttrium Oxide Thin Films Grown at Low Temperature via the Third‐Generation Mist Chemical Vapor Deposition Using Oxygen‐Supporting Sources;physica status solidi (b);2021-07-26

5. Thermal Atomic Layer Deposition of Yttrium Oxide Films and Their Properties in Anticorrosion and Water Repellent Coating Applications;Coatings;2021-04-23

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