Fabrication and Properties of Tantalum Film Deposited on Titanium through LP-CVD from TaCl5-H2
Author:
Publisher
Wiley
Subject
Process Chemistry and Technology,Surfaces and Interfaces,General Chemistry
Cited by 10 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. MD-Simulation of Duty Cycle and TaN Interlayer Effects on the Surface Properties of Ta Coatings Deposited by Pulsed-DC Plasma Assisted Chemical Vapor Deposition;INT J ENG-IRAN;2020
2. Synthesis and Characterization of Tantalum Oxide Deposited By Metal-Organic Chemical Vapour Deposition (MOCVD);IOP Conference Series: Materials Science and Engineering;2018-10-02
3. Evaluation of an artificial vertebral body fabricated by a tantalum-coated porous titanium scaffold for lumbar vertebral defect repair in rabbits;Scientific Reports;2018-06-12
4. Pulsed DC- Plasma Assisted Chemical Vapor Deposition of α-Rich Nanostructured Tantalum Film: Synthesis and Characterization;International Journal of Engineering;2017-04
5. Surface characterization and preparation of Ta coating on Ti6Al4V alloy;Journal of Alloys and Compounds;2015-09
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