13.1: Invited Paper: Excimer‐Laser Annealing: Microstructure Evolution and a Novel Characterization Technique

Abstract

AbstractRecent commercial success of high‐resolution AMLCDs and AMOLED displays has led to accelerated adoption and scale‐up of ELA, the preferred technique for creating LTPS films. Here, key aspects of the process are discussed; in particular, the formation of laser‐induced periodic surface structures (LIPSS) and the super‐lateral growth (SLG) phenomenon. Also, a novel upright‐microscopy technique is described for characterization of ELA‐processed films.