Mass spectrometric study of hexamethyldisilazane and some of itsN-substituted derivatives-Reference-Cited by-同舟云学术

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Mass spectrometric study of hexamethyldisilazane and some of itsN-substituted derivatives

Published:1975-10 Issue:10 Volume:10 Page:859-866
ISSN:0030-493X
Container-title:Organic Mass Spectrometry
language:en
Short-container-title:Org. Mass Spectrom.

Author:

Tamás J.,Miklós P.

Publisher

Wiley

Subject

Spectroscopy,Instrumentation,Molecular Medicine,Biochemistry

Reference17 articles.

1. and Abstracts, International Symposium on Mass Spectrometry of Metal Containing Compounds, London, 25th to 27th April, 1973, C5.

2. Mass Spectra of Trimethylsilyl Derivatives

3. Mass spectra of silazanes

Cited by 13 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Atomic layer deposition of LiF using LiN(SiMe3)2 and SF6 plasma;Physical Chemistry Chemical Physics;2021

2. Identification of fragment ions produced from hexamethyldisilazane and production of low-energy mass-selected fragment ion beam;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2018-09

3. Chemical composition and properties of films produced from hexamethyldisilazane by plasma-enhanced chemical vapor deposition;High Energy Chemistry;2016-05

4. Mass Spectrometric Study of Some Si-N Compounds (CH3)4-n Si{N(CH3)2}n (N = 1-4);Bulletin des Sociétés Chimiques Belges;2010-09-01

5. Single source precursors for plasma-enhanced CVD of SiCN films, investigated by mass spectrometry;Surface and Coatings Technology;2005-10

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