67-1: Novel LTPS Technology for Large Substrate
Author:
Affiliation:
1. Corporate Research and Development Group; Sakai Display Products Corp.; Osaka Japan
Publisher
Wiley
Reference12 articles.
1. XeCl Excimer laser annealing used in the fabrication of poly-Si TFT's
2. Advanced technologies for UHD curved OLED TV;Han;Journal of the Society for Information Display,2014
3. Status and Future Promise of excimer laser annealing for LTPS on Large Glass Substrates;Sobey;SID Digest of Technical Papers,2014
4. SELAX Technology for Poly-Si TFTs Integrated with Amorphous-Si TFTs;Kaitoh;SID Digest of Technical Papers,2008
5. Self-Aligned Bottom Gate LTPS Backplanes without Ion-Implantation Process;Kanegae;SID Digest of Technical Papers,2012
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1. Bottom gate single crystal Si thin-film transistors fabricated by all sputtering processes;Japanese Journal of Applied Physics;2022-07-15
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3. P‐51: Design of Integrated Gate drivers with Low Temperature Poly‐Silicon Thin Film Transistor;SID Symposium Digest of Technical Papers;2019-05-29
4. LTPS Thin-Film Transistors Fabricated Using New Selective Laser Annealing System;IEEE Transactions on Electron Devices;2018-08
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