Affiliation:
1. State key laboratory of fluid power and mechatronic systems Zhejiang University Hangzhou Zhejiang 310027 P. R. China
2. Institute of Light+X Science and Technology Faculty of Electrical Engineering and Computer Science Ningbo University Ningbo Zhejiang 315211 P. R. China
3. State key laboratory of modern optical instrumentation College of Optical Science and Engineering Zhejiang University Hangzhou Zhejiang 310027 P. R. China
Abstract
AbstractActuators containing sensors are developed for various applications. However, it is still challenging to equip miniaturized high‐precision sensors with actuators at the micrometer scale to achieve micro‐environment detection. Here, a two‐in‐one processing strategy to construct a sensor‐equipped magnetic actuator (SEMA) is proposed. The design of magnetic actuators is continuously optimized to achieve less resistance and faster acceleration. Besides, the temperature‐dependent properties of semiconductor quantum dots (QDs) are used to fabricate the temperature‐sensitive unit (TSU), with a sensitivity of up to 111 pm °C−1. Finally, as a proof of concept, the real‐time temperature detection of arbitrary micro‐area in microchannels is achieved. This method of equipping sensors with microactuators will bring many potential applications in microenvironment sensing, micro‐mechanical manipulating, and microcargo transporting.
Funder
National Natural Science Foundation of China
Natural Science Foundation of Zhejiang Province
National Key Research and Development Program of China