Thickness determination of ultra-thin films using backscattered electron spectra of a new toroidal electrostatic spectrometer-Reference-Cited by-同舟云学术

Thickness determination of ultra-thin films using backscattered electron spectra of a new toroidal electrostatic spectrometer

Published:2006-12-06 Issue:3 Volume:21 Page:197-203
ISSN:0161-0457
Container-title:Scanning
language:en
Short-container-title:Scanning

Author:

Schlichting F.,Berger D.,Niedrig H.

Publisher

Wiley

Subject

Instrumentation,Atomic and Molecular Physics, and Optics

Reference11 articles.

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3. Franz G Kuhlebrock T Kross J Erzeugung zweidimensionaler Höhen-profile aus differentiellen Interferenzkontrast Aufnahmen, DGaO, 99 Jahrestagung der DGaO 1998

4. Film-thickness determination in electron microscopy: The electron backscattering method;Niedrig;Optica Acta,1977

5. Electron backscattering from thin films;Niedrig;J Appl Phys,1982

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