Affiliation:
1. School of Microelectronics University of Science and Technology of China Hefei 230026 China
2. Frontiers Science Center for Planetary Exploration and Emerging Technologies University of Science and Technology of China Hefei 230026 China
3. Key Laboratory of Microelectronics Devices and Integration Technology Institute of Microelectronics of Chinese Academy of Sciences Beijing 100029 China
Funder
National Natural Science Foundation of China
Chinese Academy of Sciences
Fundamental Research Funds for the Central Universities
University of Science and Technology of China
China Postdoctoral Science Foundation
Subject
Mechanical Engineering,Mechanics of Materials,General Materials Science
Cited by
162 articles.
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