1. Light Technology Institute Karlsruhe Institute of Technology (KIT) Engesserstrasse 13 76131 Karlsruhe Germany
2. Institute of Microstructure Technology Karlsruhe Institute of Technology (KIT) Hermann‐von‐Helmholtz‐Platz 1 76344 Eggenstein‐Leopoldshafen Germany
3. Institute of Photonics and Quantum Electronics Karlsruhe Institute of Technology (KIT) Engesserstrasse 5 76131 Karlsruhe Germany
4. InnovationLab Speyerer Strasse 4 69115 Heidelberg Germany