Ultrasensitive and Ultraprecise Pressure Sensors for Soft Systems

Abstract

AbstractHighly sensitive soft pressure sensors have attracted tremendous attention in recent years due to their great promise in robotics, healthcare, smart wearables, etc. Although high sensitivities can be realized by existing sensing mechanisms, they usually cause large random errors owing to inhomogeneous sensing layers, thus considerably reducing the sensing precision for practical applications. Herein, a pure‐polymer and field emission bilayer structure (PFEBS)‐based transduction mechanism is presented to successfully design an ultrasensitive and ultraprecise soft pressure sensor for the first time. This unique structure enables numerous tunneling electrons generated by field emission to be transmitted through the homogeneous sensing layer, which undergoes uniform deformation under subtle pressures, simultaneously achieving a sensing precision with variation <1.62% and a sensitivity of 372.2 kPa−1. This study offers a new design strategy to develop next‐generation high‐performance flexible pressure sensors for soft systems.