Monolithic 3D CMOS Using Layered Semiconductors-Reference-Cited by-同舟云学术

Monolithic 3D CMOS Using Layered Semiconductors

Published:2016-02-02 Issue:13 Volume:28 Page:2547-2554
ISSN:0935-9648
Container-title:Advanced Materials
language:en
Short-container-title:Adv. Mater.

Author:

Sachid Angada B.¹²,Tosun Mahmut¹²³,Desai Sujay B.¹²³,Hsu Ching-Yi¹⁴,Lien Der-Hsien¹²⁵,Madhvapathy Surabhi R.¹²,Chen Yu-Ze⁶,Hettick Mark¹²⁷,Kang Jeong Seuk¹²,Zeng Yuping¹,He Jr-Hau⁵,Chang Edward Yi⁴,Chueh Yu-Lun⁶,Javey Ali¹²³⁷,Hu Chenming¹

Affiliation:

1. Electrical Engineering and Computer Sciences; University of California; Berkeley CA 94720 USA

2. Material Sciences Division; Lawrence Berkeley National Laboratory; Berkeley CA 94720 USA

3. Berkeley Sensor and Actuator Center; University of California; Berkeley CA 94720 USA

4. Department of Material Sciences and Engineering; National Chao-Tung University; Hsinchu 300 Taiwan

5. Computer, Electrical and Mathematical Sciences and Engineering Division; King Abdullah University of Science and Technology; Thuwal 23955-6900 Saudi Arabia

6. Department of Materials Science and Engineering; National Tsing Hua University; Hsinchu 30013 Taiwan

7. Joint Center for Artificial Photosynthesis; Lawrence Berkeley National Laboratory; Berkeley CA 94720 USA

Funder

Materials, Inc

Entegris, Inc

Director, Office of Science, Office of Basic Energy Sciences, and Materials Sciences

Engineering Division of the U.S. Department of Energy

Publisher

Wiley

Subject

Mechanical Engineering,Mechanics of Materials,General Materials Science

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