Substrate Potential Dependence of Optical Characteristics of a-Si:H for Shortwave Near-infrared Filter by DC and RF Sputtering-Reference-Cited by-同舟云学术

Substrate Potential Dependence of Optical Characteristics of a-Si:H for Shortwave Near-infrared Filter by DC and RF Sputtering

Published:2022-03-24 Issue:2 Volume:20 Page:68-75
ISSN:1348-0391
Container-title:e-Journal of Surface Science and Nanotechnology
language:en
Short-container-title:e-J. Surf. Sci. Nanotechnol.

Author:

Kawamata Yoshio¹,Ito Hiroshi¹,Nikkuni Hiroyuki¹,Ito Mikio¹

Affiliation:

1. National Institute of Technology, Tokyo College

Publisher

Surface Science Society Japan

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Mechanics of Materials,Condensed Matter Physics,Bioengineering,Biotechnology

Link

https://www.jstage.jst.go.jp/article/ejssnt/20/2/20_2022-012/_pdf

Reference25 articles.

1. [1] A. Deguchi, C. Hirai, H. Matsuoka, T. Nakano, K. Oshima, M. Tai, and S. Tani, in; Society 5.0: A People-centric Super-smart Society, edited by Hitachi-UTokyo Laboratory (Springer, Singapore, 2018) p. 1.

2. [2] I. Takai, H. Matsubara, M. Soga, M. Ohta, M. Ogawa, and T. Yamashita, Sensors 16, 459 (2016).

3. [3] Y. Fu and J. Liu, Procedia Manuf. 3, 1187 (2015).

4. [4] H. K. Denise, B. Richard. A. Jr, G. Marius, International Publication No. WO2014014930A2, 2014.

5. [5] A. V. Shah (Ed.), Thin-Film Silicon Solar Cells (EPFL Press, New York, 2010) p. 17.

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Film structure and optical characteristics of a-Si:H prepared with a rotary table type layer-by-layer sputtering method for application in short-wave near-infrared filters;Optical Materials Express;2022-10-04