Comparative Study on Surfaces of Single-Crystalline Substrates. From Dielectric Substance to Semiconductor and Metal. Machining and Processing Technologies and Quality of Silicon Wafer Surfaces.-Reference-Cited by-同舟云学术

Comparative Study on Surfaces of Single-Crystalline Substrates. From Dielectric Substance to Semiconductor and Metal. Machining and Processing Technologies and Quality of Silicon Wafer Surfaces.

Published:2000 Issue:11 Volume:21 Page:688-695
ISSN:0388-5321
Container-title:Hyomen Kagaku
language:en
Short-container-title:Journal of The Surface Science Society of Japan

Author:

KASAI Toshio¹

Affiliation:

1. Graduate School of Science and Engineering, Saitama University

Publisher

Surface Science Society Japan

Subject

General Earth and Planetary Sciences,General Engineering,General Environmental Science

Link

http://www.jstage.jst.go.jp/article/jsssj/21/11/21_11_688/_pdf

Reference10 articles.

1. 2) フジミインコーポレーテッド, FO Fujimi Optical Emeryカタログ (1999).

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