Processing map to control the erosion of Y<sub>2</sub>O<sub>3</sub>in fluorine based etching plasmas-Reference-Cited by-同舟云学术

Processing map to control the erosion of Y₂O₃in fluorine based etching plasmas

Author:

Kindelmann Moritz¹²^ORCID,Weber Moritz L(ukas)¹²³⁴,Stamminger Mark⁵,Buschhaus Rahel⁵,Breuer Uwe⁶,Bram Martin¹⁷,Guillon Olivier¹²⁸^ORCID

Affiliation:

1. Forschungszentrum Jülich GmbH Institute of Energy and Climate Research 1: Materials Synthesis and Processing Jülich Germany

2. Institute of Mineral Engineering RWTH Aachen University Aachen Germany

3. Forschungszentrum Jülich GmbH Peter‐Grünberg‐Institute 7: Electronic Materials Jülich Germany

4. Jülich Aachen Research Alliance JARA‐FIT Jülich Germany

5. Ruhr University Bochum Institute for Experimental Physics II Bochum Germany

6. Forschungszentrum Jülich GmbH Central Division of Analytical Chemistry Jülich Germany

7. Ruhr University Bochum Institute for Materials Bochum Germany

8. Jülich Aachen Research Alliance JARA‐Energy Jülich Germany

Publisher

Wiley

Subject

Materials Chemistry,Ceramics and Composites

Link

Reference28 articles.

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