Pb-Diffusion Barrier Layers for PbTiO3 Thin Films Deposited on Si Substrates by Metal Organic Chemical Vapor Deposition-Reference-Cited by-同舟云学术

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Pb-Diffusion Barrier Layers for PbTiO3 Thin Films Deposited on Si Substrates by Metal Organic Chemical Vapor Deposition

Published:1995-02 Issue:2 Volume:78 Page:337-341
ISSN:0002-7820
Container-title:Journal of the American Ceramic Society
language:en
Short-container-title:

Author:

Hwang Cheol Seong,Kim Hyeong Joon

Publisher

Wiley

Subject

Materials Chemistry,Ceramics and Composites

Link

http://onlinelibrary.wiley.com/wol1/doi/10.1111/j.1151-2916.1995.tb08805.x/fullpdf

Reference10 articles.

1. Deposition and Characterization of PbTiO3 Thin Films on Silicon Wafers Using Metalorganic Sources;Hwang;J. Electron. Mater.,1993

2. Examination of Barrier Layers for Lead Zirconate Titanate Thin Films;Madsen;J. Electron. Matrr.,1992

3. Investigation of Pt Bottom Electrodes for ‘In-Situ’ Deposited Ph(Zr,Ti)O3 (PZT) Thin Films;Bruchhaus;see Ref.

4. Analysis of Pt Ti Electrodes for PLZT Capacitors;Olowolafe;see Ref.

Cited by 7 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. TEM characterisation of PZT films prepared by a diol route on platinised silicon substrates;Journal of the European Ceramic Society;2000-08

2. Preparation and Characterization of Pb(Zr, Ti)O3Thin Films by Metalorganic Chemical vapor Deposition Using a Solid Delivery System;Journal of Materials Research;2000-06

3. Structural and microstructural analyses of sol-gel lead titanate optical planar waveguides;Thin Solid Films;1999-07

4. The effects of capping barrier layers on the compositional and structural variations of integrated Pb(Zr, Ti)O3 ferroelectric capacitor having the dimension 3 × 3 μm2;Journal of Materials Research;1999-05

5. Catalytic decomposition of nitrous oxide N 2O: a study for p-block-element lead in PbO—ZrO2/Al2O3 systems;Applied Catalysis B: Environmental;1996-09

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