Excellent repeatability, all-sapphire Fabry Perot optical Pressure sensor based on wet etching and direct bonding for Harsh Environment Applications-Reference-Cited by-同舟云学术

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Excellent repeatability, all-sapphire Fabry Perot optical Pressure sensor based on wet etching and direct bonding for Harsh Environment Applications

Published:2021-06-10 Issue:13 Volume:29 Page:19831
ISSN:1094-4087
Container-title:Optics Express
language:en
Short-container-title:Opt. Express

Author:

Shao Zhiqiang,Wu Yalin,Sun Zhiqiang,Wang Wei,Liu Zhiyuan,Zhang Chaozhu,Bi Jiayu,Song Erdong

Funder

National High-tech Research and Development Program

Publisher

The Optical Society

Subject

Atomic and Molecular Physics, and Optics

Reference12 articles.

1. Sapphire direct bonding as a platform for pressure sensing at extreme high temperatures

2. High-accuracy optical pressure sensor for gas turbine monitoring

3. High-temperature high-bandwidth fiber optic MEMS pressure-sensor technology for turbine engine component testing

4. High-Temperature Mechanical Characterization of Laser-Machined Sapphire for High-Temperature Pressure Sensor Applications

5. Performance Evaluation of Fabry-Perot Temperature Sensors in Nuclear Power Plant Measurements

Cited by 15 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Numerical and Experiment Analysis of Sapphire Sandwich-Structure Fabry–Perot Pressure Sensor through Fast Fourier Transform and Mean Square Error Demodulation Algorithm;Materials;2024-07-24

2. Diaphragm-Structured Fiber-Optic Pressure Sensors for Oil Downhole Applications;IEEE Sensors Journal;2024-05-01

3. Recent Progress in MEMS Fiber-Optic Fabry–Perot Pressure Sensors;Sensors;2024-02-07

4. High-speed and error-suppressed fiber-optic F-P system for dynamic pressure measurement at high-temperature;IEEE Sensors Journal;2024

5. High Sensitivity All Sapphire-Based Optical Fiber Fabry–Perot Pressure Sensor for Harsh Environment;IEEE Transactions on Instrumentation and Measurement;2024

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