Author:
Zhou Jingjie,Cong Qingyu,Lv Liming,Yao Zhanshi,Zhu Shiyang,Wang Yuxi,Li Zhaoyi,Fan Zuowen,Zeng Xianfeng,Hu Ting,Jia Lianxi
Abstract
We first report the thin-film lithium niobate (TFLN) electro-optic Mach-Zehnder modulator (MZM) on an 8-inch silicon substrate fabricated in the back-end-of-line (BEOL) of CMOS foundry. It operates at 1550 nm with electro-optical response of only 1.5 dB roll-off at 67 GHz.
Cited by
1 articles.
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