Instantaneous measurement of surface roughness spectra using white-light scattering projected on a spectrometer

Abstract

Following on from previous studies on motionless scatterometers based on the use of white light, we propose a new, to the best of our knowledge, experiment of white-light scattering that should overtake the previous ones in most situations. The setup is very simple as it requires only a broadband illumination source and a spectrometer to analyze light scattering at a unique direction. After introducing the principle of the instrument, roughness spectra are extracted for different samples, and the consistency of results is validated at the intersection of bandwidths. The technique will be of great use for samples that cannot be moved.