Chromaticity-integrated principal component analysis for spectral phase measurement in spectrally resolved white light interferometry

Abstract

In this paper, we propose chromaticity-integrated principal component analysis for spectral phase measurement using three phase shifted spectral interferograms with non-uniform phase shifts. A spectral interferogram exhibits an inherent variable phase shift along the chromaticity axis that introduces errors in spectral phase measurement on wavelengths other than the mean wavelength. To address this issue, we employ the principal component analysis by integrating the spectral information from neighboring pixels along the chromaticity axis for each pixel in the scan axis of the interferogram. To validate the efficacy of the proposed algorithm, we compared its results with the traditional five-step algorithm.