Phase measuring deflectometry for convex aspheric surface measurement

Abstract

This paper introduces what we believe to be a novel approach to accurately measure the shape of convex aspherical surfaces with large slope gradients. This approach employs a pre-distortion system to enhance the visibility of the structured light pattern that is captured by camera. The data processing involves iterative methods to obtain surface shape data. The initial step in the experimental calibration involves establishing a reference plane, which serves as the starting point for the iterative process. The calculation for slope is subsequently utilized to determine the initial slope of the surface under test, and the height of the tested element is derived by integrating these slopes. Through multiple iterations and continuous updating of the surface height, the precise and authentic true surface height is ultimately achieved. The method’s accuracy is assessed through the measurement of a highly steep convex aspherical area with a diameter of 5.2 mm and a radius of curvature of approximately 7.7 mm. The proposed method demonstrates root mean square accuracy that can reach half a wavelength when compared to the measurement results obtained from high-precision profilers.