Author:
Tang Chien-Jen,Li Ching-Tang,Zhang Zhi-Xuan
Abstract
A thin-film sensor consisting of W-VO2 was deposited onto a TiO2(R)/AZO/B270 substrate using reactive high-power impulse magnetron sputtering. The resulting crystalline quality and optical properties were investigated by UV-VIS-NIR spectroscopy and an X-ray diffractometer.