SiN half-etch horizontal slot waveguides for integrated photonics: numerical modeling, fabrication, and characterization of passive components

Author:

Kempf Eva12ORCID,Romeo Pedro Rojo2,Gassenq Alban3,Taute Arnaud12,Chantraine Paul1,John Jimmy2,Belarouci Ali2,Monfray Stephane1,Boeuf Frederic1,Charette Paul G.4,Orobtchouk Regis2

Affiliation:

1. STMicroelectronics

2. Université de Lyon, Institut des Nanotechnologies de Lyon

3. Université de Lyon, Institut Lumière Matière

4. Université de Sherbrooke – 3IT

Abstract

This work presents a “half-etch” horizontal slot waveguide design based on SiN, where only the upper SiN layer is etched to form a strip that confines the mode laterally. The numerical modeling, fabrication, and characterization of passive waveguiding components are described. This novel slot waveguide structure was designed with on-chip light amplification in mind, for example with an Er-doped oxide spacer layer. Proof-of-concept racetrack resonators were fabricated and characterized, showing quality factors up to 50,000 at critical coupling and residual losses of 4 dB/cm at wavelengths away from the N-H bond absorption peak in SiN, demonstrating the high potential of these horizontal slot waveguides for use in active integrated photonics.

Funder

This work was supported by a European IPCEI program

Publisher

Optica Publishing Group

Subject

Atomic and Molecular Physics, and Optics

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