Synthesis of nanometer-sized SiC powders through chemical vapour deposition III. Effect of overall cell pressure
Author:
Publisher
Elsevier BV
Subject
Condensed Matter Physics,General Materials Science
Reference12 articles.
1. Synthesis of Silicon Carbide-Silicon Nitride Composite Ultrafine Particles Using a Carbon Dioxide Laser
2. Thermal plasma chemical vapour deposition for SiC powders from SiCH3Cl3-H2
3. Infrared absorption of?-SiC particles prepared by chemical vapour deposition
4. Direct production of ultra-fine nitrides (Si3N4 and AIN) and carbides (SiC, WC and TiC) powders by the arc plasma method
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1. Synthesis of SiC powder by RF plasma technique;Powder Technology;2011-12
2. Structural transformation of carbon nanotubes to silicon carbide nanorods or microcrystals by the reaction with different silicon sources in rf induced CVD reactor;Synthetic Metals;2004-02
3. Effect of chemical vapor deposition energy sources on the structure of SiC prepared by carbon nanotubes-confined reaction;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2003
4. Growth and characterization of SiC micro-crystals on Si(100) substrate by the chemical vapor deposition method;Diamond and Related Materials;2002-09
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