Residual stresses and mechanical properties of a ZnO pyroelectric sensor
Author:
Publisher
Elsevier BV
Subject
Applied Mathematics,Mechanical Engineering,Condensed Matter Physics,General Materials Science
Reference14 articles.
1. An integrated pyroelectric infrared sensor with a PZT thin film;Chang;Sens. Actuators A,1998
2. Partial-electroded ZnO pyroelectric sensors for responsivity improvement;Wei;Sens. Actuators A,2006
3. Pyroelectric sensor array for in-line monitoring of infrared laser;Chong;Sens. Actuators A,2002
4. Measurements of residual stress in the thin film micro-gas sensors containing metallic layers;Kim;Thin Solid Films,2001
5. An analytical model for predicting residual stresses in progressively deposited coatings Part 1: planar geometry;Tsui;Thin Solid Films,1997
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