Author:
Brandenburg Albrecht,Edelhaäuser Rainer,Hutter Frank
Subject
Materials Chemistry,Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
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5. Integrated optic accelerometer employing a cantilever on a silicon substrate;Ohkawa;Jpn. Appl. Phys.,1989
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