Author:
Via F. La,Galvagno G.,Roccaforte F.,Giannazzo F.,Franco S. Di,Ruggiero A.,Reitano R.,Calcagno L.,Foti G.,Mauceri M.,Leone S.,Pistone G.,Portuese F.,Abbondanza G.,Abbagnale G.,Veneroni A.,Omarini F.,Zamolo L.,Masi M.,Valente G.L.,Crippa D.
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference4 articles.
1. N. Karoda, K. Shibahara, W.S. Yoo, S. Nishino, H. Mastunami, Extended Abstract, 19th Conference on Solid State Devices and Materials, Tokyo, 1987, 227.
2. Reduced order model for the CVD of epitaxial silicon from silane and chlorosilanes
3. Semiconductors and Semimetals;Cavalotti,2001
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