Author:
Arora William J.,Smith Henry I.,Barbastathis George
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference7 articles.
1. Membrane folding to achieve three-dimensional nanostructures: Nanopatterned silicon nitride folded with stressed chromium hinges
2. Origami fabrication of nanostructured, three-dimensional devices: Electrochemical capacitors with carbon electrodes
3. L. Xia, W. Wu, J. Xu, Y. Hao, Y. Wang, MEMS 2006, p. 118, Istanbul, Turkey, January 22–26, 2006.
4. Use of ion implantation to eliminate stress-induced distortion in x-ray masks
Cited by
35 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献