Silicon microresonator arrays: A comprehensive study on fabrication techniques and pH-controlled stress-induced variations in cantilever stiffness-Reference-Cited by-同舟云学术

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Silicon microresonator arrays: A comprehensive study on fabrication techniques and pH-controlled stress-induced variations in cantilever stiffness

Published:2024-04 Issue: Volume:287 Page:112154
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Brunetti G.,De Pastina A.,Rotella C.,Usov V.,Villanueva G.,Hegner M.

Funder

Science Foundation Ireland

École Polytechnique Fédérale de Lausanne

Schweizerischer Nationalfonds zur Förderung der Wissenschaftlichen Forschung

Publisher

Elsevier BV

Reference33 articles.

1. Atomic force microscope;Binnig;Phys. Rev. Lett.,1986

2. Rapid label-free nanotechnological immunoassay for analysis of candidate malaria vaccines;Brunetti;Appl. Cell Biol.,2021

3. Nanotechnological immunoassay for rapid label-free analysis of candidate malaria vaccines;Brunetti;Nanoscale,2021

4. Quantitative epitope analysis reveals drastic 63% reduced immuno-affinity and 60% enhanced transmissibility for SARS-CoV-2 variants;Brunetti;Nanoscale Adv.,2021

5. Rapid and label-free nanomechanical detection of biomarker transcripts in human RNA;Zhang;Nat. Nanotechnol.,2006

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