High-throughput thermodynamic analysis of epitaxial growth of β-Ga2O3 by the chemical vapor deposition method from TMGa-H2O system

Author:

Zhang Chitengfei,Lu Pengjian,Qiu Wei,Kuang Xiaoxu,Tu Rong,Zhang Song

Publisher

Elsevier BV

Subject

Materials Chemistry,Mechanics of Materials,General Materials Science

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5. Ultra-wide bandgap semiconductor Ga2O3 power diodes;Zhang;Nat. Commun.,2022

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