Unlocking the potential of piezoelectric films grown on vertical surfaces for inertial MEMS-Reference-Cited by-同舟云学术

Unlocking the potential of piezoelectric films grown on vertical surfaces for inertial MEMS

Published:2022-12 Issue: Volume:33 Page:104522
ISSN:2352-4928
Container-title:Materials Today Communications
language:en
Short-container-title:Materials Today Communications

Author:

Gabrelian Artem,Ross Glenn,Bespalova Kristina,Paulasto-Kröckel Mervi

Publisher

Elsevier BV

Subject

Materials Chemistry,Mechanics of Materials,General Materials Science

Reference27 articles.

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5. Single drive multi-axis gyroscope with high dynamic range, high linearity and wide bandwidth;Faisal;Micromachines,2019

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