Tailoring dielectric properties of PDCs-SiCN with bimodal pore-structure by annealing combined with oxidation

Author:

Li MingxingORCID,Cheng Laifei,Ye Fang,Wang Yusheng,Zhang Conglin

Funder

Natural Science Foundation of China

National Key R&D Program of China

National Science and Technology Major Project

Publisher

Elsevier BV

Subject

Materials Chemistry,Ceramics and Composites

Reference53 articles.

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2. Polymer-derived SiCN and SiOC ceramics – structure and energetics at the nanoscale;Mera;J. Mater. Chem. A,2013

3. A covalent micro/nano-composite resistant to high-temperature oxidation;Riedel;Nature,1995

4. Newtonian viscosity of amorphous silicon carbonitride at high temperature;An;J. Am. Ceram. Soc.,1998

5. Oxidation behavior of a fully dense polymer-derived amorphous silicon carbonitride ceramic;Bharadwaj;J. Am. Ceram. Soc.,2004

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