Self-consistent determination of electron mean free paths for the correction of sputter profiles-Reference-Cited by-同舟云学术

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Self-consistent determination of electron mean free paths for the correction of sputter profiles

Published:1983-01 Issue:2 Volume:14 Page:221-228
ISSN:0378-5963
Container-title:Applications of Surface Science
language:en
Short-container-title:Applications of Surface Science

Author:

Kirschner J.,Etzkorn H.W.

Publisher

Elsevier BV

Subject

General Engineering

Reference20 articles.

1. J. Kirschner and H.W. Etzkorn, in: Topics in Current Physics, Ed. H. Oechsner (Springer, Heidelberg, in press).

2. High resolution Auger sputter profiling study of the effect of phosphorus pileup on the Si–SiO2 interface morphology

3. Depth resolution of sputter profiling investigated by combined Auger-x-ray analysis of thin films

4. Editorial

5. Quantitative Auger electron spectroscopy and electron ranges

Cited by 8 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Surface and depth analysis based on sputtering;Topics in Applied Physics;1991

2. Sputtering;Computer Simulation of Ion-Solid Interactions;1991

3. Quantitative predictions of sputtering phenomena;Surface and Interface Analysis;1989-12

4. Auger-Elektronen-Mikroanalyse Grundlagen und Anwendungen;Angewandte Oberflächenanalyse mit SIMS Sekundär-Ionen-Massenspektrometrie AES Auger-Elektronen-Spektrometrie XPS Röntgen-Photoelektronen-Spektrometrie;1986

5. Atomic mixing and electron range effects in ultrahigh‐resolution profiles of the Ta2O5/Ta interface by argon sputtering with Auger electron spectroscopy;Journal of Applied Physics;1984-10

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