Author:
Schroth A.,Lee C.,Matsumoto S.,Maeda R.
Funder
New Energy and Industrial Technology Development Organization
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference6 articles.
1. O. Auciello, R. Ramesh (Eds.), Electroceramic thin films: Part I. Processing, MRS Bulletin, Special issue, June 1996.
2. Silicon micromachined two-dimensional galvano optical scanner;Asada;IEEE Trans. Magnetics,1994
3. Y. Ohtuka, H. Nishikawa, T. Koumura, T. Hattori, 2-Dimensional optical scanner applying a torsional resonator with 2 degrees of freedom, Proc. MEMS '95, Amsterdam, Netherlands, 1995, pp. 306–309.
4. Characteristics of sol–gel derived PZT thin films with lead oxide cover layers and lead titanate interlayers;Lee;J. Mater. Sci.,1996
5. Electrostatic micromechanic actuators;Breng;J. Micromech. Microeng.,1992
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