Author:
Lorenz H.,Despont M.,Fahrni N.,Brugger J.,Vettiger P.,Renaud P.
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference14 articles.
1. Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography galvanoforming and plastic moulding (LIGA process);Becker;Microelectron. Eng.,1986
2. The LIGA technique — a novel concept for microstructures and the combination with Si-technologies by injection molding;Menz,1991
3. Fabrication of assembled micromechanical components via deep x-ray lithography;Guckel,1991
4. Molding of three-dimensional microstructures by the LIGA process;Harmening,1992
5. Sub-micron LIGA process for movable microstructures;Börner;Microelectron. Eng.,1996
Cited by
478 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献