Author:
Kahn H.,Tayebi N.,Ballarini R.,Mullen R.L.,Heuer A.H.
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference14 articles.
1. Polysilicon integrated microsystems: technologies and applications;Howe;Sens. Actuators, A,1996
2. Fracture tests of polysilicon film;Sharpe;MRS Symp. Proc.,1997
3. Tensile strength and fracture toughness of surface micromachined polycrystalline silicon thin films prepared under various conditions;Tsuchiya;MRS Symp. Proc.,1997
4. The fracture toughness of polysilicon microdevices: a first report;Ballarini;J. Mater. Res.,1997
5. H. Kahn, R. Ballarini, R.L. Mullen, A.H. Heuer, Electrostatically actuated failure of micro-fabricated polysilicon fracture mechanics specimens. Proc. R. Soc. London, Ser. A: Math., Phys. Eng. Sci., in press.
Cited by
143 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献