1. Micro engineering;Alting;CIRP Ann.,2003
2. Ultra-fine machining tool/molds by LIGA technology;Yang;J. Micromech. Microeng,2001
3. Ultra-deep LIGA process;Cheng;J. Micromech. Microeng.,1999
4. State of the art of micromachining;Masuzawa;CIRP Ann—Manuf. Technol.,2000
5. Tool-based micro-machining;Asad;J. Mater. Process. Technol.,2007