Author:
Wang Xinchen,Alshoul Mohammad,Zhou Huimin,Deng Jia,Wang Zimo
Funder
National Science Foundation
SUNY Binghamton
Reference56 articles.
1. Atomic and close-to-atomic scale manufacturing: a review on atomic layer removal methods using atomic force microscopy;Mathew;Nanomanufacturing Metrol,2020
2. Design and evaluation of a mechanical nanomanufacturing system for nanomilling;Gozen;Precis Eng,2012
3. Electric-field-assisted contact mode atomic force microscope-based nanolithography with low stiffness conductive probes;Zhou;J Micro Nano-Manuf,2022
4. Advancements and challenges in development of atomic force microscopy for nanofabrication;Tseng;Nano Today,2011
5. Tip-based nanomachining on thin films: a mini review;Chang;Nanomanufacturing Metrol,2021