Author:
Vergöhl M.,Malkomes N.,Staedler T.,Matthée T.,Richter U.
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference12 articles.
1. Antireflective coatings on large scale substrates produced by reactive twin-magnetron sputtering
2. S. Schiller, U. Heisig, K. Steinfelder, J. Strümpfel, A. Friedrich, R. Fricke, 6th Int. Conf. on Ion and Plasma Assisted Techniques, Vol. 23, 1987, pp. xi, 481.
3. Optical and electrical properties of doped zinc oxide films prepared by ac reactive magnetron sputtering
4. New approaches for reactive sputtering of dielectric materials on large scale substrates
5. Comparison of transparent conductive oxide thin films prepared by a.c. and d.c. reactive magnetron sputtering
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