Mechanical assessment of suspended ALD thin films by bulge and shaft-loading techniques-Reference-Cited by-同舟云学术

Mechanical assessment of suspended ALD thin films by bulge and shaft-loading techniques

Published:2014-03 Issue: Volume:66 Page:370-377
ISSN:1359-6454
Container-title:Acta Materialia
language:en
Short-container-title:Acta Materialia

Author:

Berdova Maria^ORCID,Ylitalo Tuomo,Kassamakov Ivan,Heino Jouni,Törmä Pekka T.,Kilpi Lauri,Ronkainen Helena,Koskinen Jari,Hæggström Edward,Franssila Sami

Publisher

Elsevier BV

Subject

Metals and Alloys,Polymers and Plastics,Ceramics and Composites,Electronic, Optical and Magnetic Materials

Reference52 articles.

1. MEMS Reliability Review

2. MEMS reliability from a failure mechanisms perspective

3. Atomic-layer deposition of wear-resistant coatings for microelectromechanical devices

4. High-isolation lateral RF MEMS capacitive switch based on HfO2 dielectric for high frequency applications

5. The influence of nanoscale atomic-layer-deposited alumina coating on the fatigue behavior of polycrystalline silicon thin films

Cited by 44 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Layer‐Engineered Functional Multilayer Thin‐Film Structures and Interfaces through Atomic and Molecular Layer Deposition;Advanced Materials Interfaces;2024-06-28

2. New avenues for residual stress analysis in ultrathin atomic layer deposited free-standing membranes through release of micro-cantilevers;Heliyon;2024-02

3. Characterization of PEHD Films Using Uniaxial and Biaxial Testing;Lecture Notes in Mechanical Engineering;2024

4. Application of the bulge test combined with 3D-DIC for biaxial characterization of PLA films and defect detection;Journal of Plastic Film & Sheeting;2023-08-10

5. Effect of geometric deviations on the strength of additively manufactured ultralight periodic shell-based lattices;Engineering Failure Analysis;2023-08