Deposition of high-quality, nanoscale SiO2 films and 3D structures
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Published:2024-06
Issue:
Volume:38
Page:102175
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ISSN:2352-9407
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Container-title:Applied Materials Today
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language:en
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Short-container-title:Applied Materials Today
Author:
Cannon PaulORCID,
McGlynn EndaORCID,
O'Neill Darragh,
Darcy ConorORCID,
Rouse Erin,
O'Connor Robert,
Freeland Brian,
O'Connell Barry,
Gaughran JenniferORCID
Funder
Irish Research Council