Author:
Tonisch K.,Cimalla V.,Foerster Ch.,Romanus H.,Ambacher O.,Dontsov D.
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference22 articles.
1. Microsensors MEMS and Smart Devices;Gardner,2001
2. Proceedings of the International Conference on Solid State Sensors and Actuators, June 1997. Proceedings of the IEEE Workshop Micro Electro Mechanical Systems, Heidelberg, 1998.
3. Nearly amorphous to epitaxial growth of aluminium nitride films;Leung;Diamond Rel. Mater.,2005
4. Optical and structural properties of highly c-axis oriented aluminum nitride prepared by sputter-deposition in pure nitrogen;Drüsedau;Thin Solid Films,2000
5. Morphological properties of AlN piezoelectric thin films deposited by dc reactive magnetron sputtering;Xu;Thin Solid Films,2001
Cited by
179 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献