Author:
Koo Kyo-in,Chung Hum,Yu Youngsuk,Seo Jongmo,Park Jaehong,Lim Jung-Min,Paik Seung-Joon,Park Sungil,Choi Hyun Min,Jeong Myoung-Jun,Kim Gil Sub,Cho Dong-Il Dan
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
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5. AFM probe tips using heavily boron-doped silicon cantilevers realized in a 〈110〉 bulk silicon wafer;Cho,2000
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