Fabrication and characterization of a force coupled sensor–actuator system for adjustable resonant low frequency vibration detection-Reference-Cited by-同舟云学术

Fabrication and characterization of a force coupled sensor–actuator system for adjustable resonant low frequency vibration detection

Published:2008-07 Issue: Volume:145-146 Page:245-256
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Forke Roman,Scheibner Dirk,Hiller Karla,Gessner Thomas,Dötzel Wolfram,Mehner Jan

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference19 articles.

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4. A low-frequency micromechanical resonant vibration sensor for wear monitoring;Fritsch;Sens. Actuators A: Phys.,1997

5. Resonant silicon vibration sensors with voltage controlled frequency tuning capability;Wibbeler,1999

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