A polymer trench filling based silicon isolation technique and its application to two-axis scanning comb-drive micromirrors-Reference-Cited by-同舟云学术

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A polymer trench filling based silicon isolation technique and its application to two-axis scanning comb-drive micromirrors

Published:2024-05 Issue: Volume:370 Page:115256
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Cao Yingchao,Ding Yingtao,wang Hua,Yan Yangyang,Qi Qiangxian,Jia Yilong,Wu Yekai,Xie Huikai

Funder

National Natural Science Foundation of China

National Science and Technology Planning Project

Publisher

Elsevier BV

Reference23 articles.

1. Resonant 1D MEMS mirror with a total optical scan angle of 180° for automotive LiDAR;Schwarz,2020

2. An electrostatically driven 2D micro-scanning mirror with capacitive sensing for projection display;Hung;Sens. Actuators A: Phys.,2015

3. A 1×20 MEMS mirror array with large scan angle and low driving voltage for optical wavelength-selective switches;An;Sens. Actuators A: Phys.,2021

4. Scanning optimization of an electrothermally-actuated MEMS mirror for applications in optical coherence tomography endoscopy;Liu;Sens. Actuators A: Phys.,2022

5. A curved multimorph based electrothermal micromirror with large scan range and low drive voltage;Pal;Sens. Actuators A: Phys.,2011

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A 2D MEMS Crosstalk-Free Electromagnetic Micromirror for LiDAR Application;Journal of Microelectromechanical Systems;2024

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