Design and manufacturing of an electrostatic MEMS relay for high power applications-Reference-Cited by-同舟云学术

Design and manufacturing of an electrostatic MEMS relay for high power applications

Published:2021-04 Issue: Volume:321 Page:112569
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Copt Florian,Civet Yoan,Koechli Christian,Perriard Yves

Funder

École Polytechnique Fédérale de Lausanne

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

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1. 10-Amp Power-Mems Irreversible Toggle Switch with Drie-Etched Side-Wall Au Plating and Magnetic Actuation;2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS);2024-01-21

2. Design and Simulation of a Closed Loop Controlled Linear Displacement MEMS Micromotor, Based on a Floating Gate Transistor;Silicon;2023-05-06

3. Investigation of the effect of arteriole clogging of the heart on the characteristics of intravenous blood flow;Scientia Iranica;2023-02-01

4. A Simple Process for the Fabrication of Parallel-Plate Electrostatic MEMS Resonators by Gold Thermocompression Bonding;2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS);2023-01-15