Common-path laser encoder-Reference-Cited by-同舟云学术

Common-path laser encoder

Published:2013-01 Issue: Volume:189 Page:86-92
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Wu Chyan-Chyi,Yang Jhih-Sheng,Cheng Chun-Yao,Chen Yan-Zou

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference18 articles.

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5. Sub-micron position measurement and control on precision machine tools with laser interferometry;Steinmetz;Precision Engineering,1990

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