Microstructure and thermal conductivity of AlN coating on Cu substrate deposited by arc ion plating
Author:
Funder
National Natural Science Foundation of China
Publisher
Elsevier BV
Subject
Condensed Matter Physics,General Materials Science
Reference37 articles.
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5. Effect of substrate biasing and temperature on AlN thin film deposited by cathodic arc ion;Khan;Mater. Sci. Semicond. Process.,2013
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