Gas-phase ion chemistry of BF3/CH4 mixtures: Activation of methane by BF2+ ions
Author:
Publisher
Elsevier BV
Subject
Physical and Theoretical Chemistry,General Physics and Astronomy
Reference41 articles.
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3. Ion energy distributions measured inside a high-voltage cathode in a BF3pulsed dc plasma used for plasma doping: experiments andab initiocalculations;Plasma Sources Science and Technology;2012-11-07
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