Ultra-precision surface finishing by ion beam and plasma jet techniques—status and outlook
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference27 articles.
1. Extreme ultraviolet lithography: A review
2. Review of progress in extreme ultraviolet lithography masks
3. International innovations in optical finishing
4. Demonstration of an ion-figuring process
5. Ion beam and plasma jet etching for optical component fabrication
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3. The Satisloh plasma polisher: plasma surface figuring ultra precision optics;Optifab 2023;2023-11-30
4. Rolling model analysis of material removal in elastic emission machining;International Journal of Mechanical Sciences;2023-11
5. Influence of Fluence and Pulse Number on Laser Cleaning of Atmospheric‐Pressure‐Plasma‐Jet‐Etched Optical Glasses;physica status solidi (a);2023-10-26
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