Subject
Mechanical Engineering,Mechanics of Materials,Acoustics and Ultrasonics,Condensed Matter Physics
Reference56 articles.
1. Resonant silicon sensors;Stemme;J. Micromech. Microeng.,1991
2. Micromachined inertial sensors;Yazdi;Proc. IEEE,1998
3. Frequency-selective MEMS for miniaturized communication devices;Nguyen,1998
4. Electrically coupled MEMS bandpass filters: Part i: With coupling element;Pourkamali;Sens. Actuator A Phys.,2005
5. Electrically coupled MEMS bandpass filters;Pourkamali;Sens. Actuator A Phys.,2005
Cited by
25 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献